THE STUDY OF PLASMA PARAMETER AND THE EFFECT OF EXPERIMENT SET UP MODIFICATION BY USING MODELING SOFTWARE
DOI:
https://doi.org/10.22452/mjs.sp2019no3.1Keywords:
plasma, electron density, plasma modeling, electric field, and plasma diagnosisAbstract
Plasma technology has grown in many sectors, especially in the industrial sector. The improvement of the experiment set up and the characterization were important to achieve the optimum process and better result in the plasma processing. The characterization process can be done by using plasma diagnosis devices and modeling software. In the present study, the modeling software was utilized to characterize the plasma parameter. The characterization process was focused in the electron density. Furthermore, the modeling software was employed to design and modifying the experiment set up. Then, the modeling result was compared with the experiment diagnosis result. The COMSOL software was utilized to study the effect of electron density. The pressure and DC-bias voltage were varied during the simulation process. The high electron density was achieved in the high pressure and high DC bias voltage. The experiment diagnosis result by using Langmuir probe was also indicated the same trend in the electron density. The JMAG software was also utilized to modify and analyzing the experiment set up. Originally, the electric field distribution was concentrated in the electrode and DC-bias plate. The strong distribution of electric field was indicated with green color. The electric field distribution was moved to the center area in the modification of experiment set up. The modifications of experiment set up provided the new way to confine the electric field. The high concentrate of electric field indicated the high movement of electron and high concentration of plasma density.
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